Technical White Paper

White Paper: Profitability Innovation in Legacy Fabs

Strategies for Equipment Life Extension and Next-Gen Efficiency

Executive Summary

As the global semiconductor market bifurcates into leading-edge and legacy segments, efficient operation of existing equipment and transition to next-gen power semiconductors (SiC/GaN) have become core survival strategies. This white paper analyzes FabOptima's technical solutions and the resulting ROI innovation.

1. Global Market Environment Analysis

With major OEMs focusing exclusively on sub-5nm processes, a maintenance gap has emerged for legacy equipment (200mm/300mm Mature nodes) that still accounts for 60% of global wafer production.

Market Gap

Supply Chain Bottlenecks: Increased risks of downtime and rising used equipment costs due to EOL (End of Life) parts.

Strategic Value

Strategic Value: Expansion of essential mature node chip demand for EVs, power control, and industrial sensors.

2. FabOptima Process Optimization Technology

"We go beyond simple maintenance, combining 'Physics-based Digital Twins' with 'Custom Hardware Engineering'."

  • CVD/Etch Gas Flow Control: Proprietary showerhead designs improving chamber non-uniformity by 15%.
  • IR Sensor-based Precision Mapping: Preventing catastrophic crashes by detecting wafer protrusions in cassettes beforehand.

3. Transition to Next-Gen Power Semiconductors (SiC/GaN)

Providing bridge solutions to upgrade Silicon-based equipment for SiC processes.

Thermal Management

Thermal Bowing Correction: Hardware kits to control wafer warping during high-temperature SiC growth.

Particle Control

Particle Trace Control: Byproduct management technology specific to high-temperature SiC processing.

4. Quantitative ROI Expectations

+8%

Uptime

Uptime Enhancement: 8% increase in annual availability through proprietary parts replacement and predictive maintenance.

Max 3.2%

Yield Gain

Yield Improvement: 1.5% - 3.2% gain in key process yields via deviation optimization.

-70%

CAPEX Saving

Cost Efficiency: 70% reduction in CAPEX compared to new equipment acquisition.

Conclusion: The Future of Legacy Fabs with FabOptima

Through proven engineering capabilities and flexible business models, our clients' legacy fabs will be reborn from simple assets into powerful cash-generating engines.